Welcome to the Microtechnology and Microsystems (Micro²) Laboratory of ETS and UQAM

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Recent Publications

Reduced-gap CMUT implementation in PolyMUMPs for air-coupled and underwater applications

Tawfik, H.H. | Alsaiary, T. | Elsayed, M.Y. | Nabki, F. | El-Gamal, M.N.
2019
Sensors and Actuators, A: Physical

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A System-Level Methodology for the Design of Reliable Low-Power Wireless Sensor Networks

Brini, O. | Deslandes, D. | Nabki, F.
2019
Sensors (Basel, Switzerland)

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870 000 Q-Factor Capacitive Lamé Mode Resonator With Gap Closing Electrodes Enabling 4.4 kΩ Equivalent Resistance at 50 V

Elsayed, M.Y. | Nabki, F.
2019
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

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Low-hysteresis and fast response time humidity sensors using suspended functionalized carbon nanotubes

Arunachalam, S. | Izquierdo, R. | Nabki, F.
2019
Sensors (Switzerland)

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In-Plane High-Sensitivity Capacitive Accelerometer in a 3-D CMOS-Compatible Surface Micromachining Process

Alfaifi, A. | Alhomoudi, I.A. | Nabki, F. | El-Gamal, M.N.
2019
Journal of Microelectromechanical Systems

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